乙醇钽（Ta(OC2H5)5）是一种醇盐钽 ，可用作化学气相沉积（CVD）法制备氧化钽的前体。它具有良好的挥发性和热稳定性。它可以在无水乙醇中通过钽板的阳极氧化来合成。 应用 Ta(OC2H5)5可用于形成超薄氧化钽电容器。它也可用作制备碳化钽纳米粉的液体前体，用于金属表面硬化。 Tantalum(V) ethoxide Ta(OC2H5)5is a tantalum alkoxide that can be used as a precursor in the preparation of tantalum oxide by chemical vapor deposition (CVD). It has excellent volatility and thermal stability. It can be synthesized by anodic oxidation of tantalum plate in anhydrous ethanol.Ta(OC2H5)5can be used in the formation of ultrathin tantalum oxide based capacitors. It can also be used as a liquid precursor in the preparation of tantalum carbide nanopowder for hard coating on metal surfaces.